Significant progress in key technologies for deep ultraviolet lasers and intraocular lenses

椐Understand that recently, Tsinghua University and other units jointly undertaken the "Twelfth Five-Year Plan" 863 Program new material field "UV laser industrialization hub technology and application" and the Institute of Physics and Chemistry of the Chinese Academy of Sciences under the "deep ultraviolet laser and artificial crystal hub technology" The project has made significant progress and recently passed the technical acceptance of the project.



Because of the high wave energy and high photon energy, the deep ultraviolet laser has important application value in many fields such as high resolution imaging, spectral application, and microfabrication. The practical and precise deep ultraviolet light source has always been the goal pursued by scientists. . China has the international leading edge in the field of deep ultraviolet crystal materials and laser technology, but with the development of applications, there is an urgent need for higher performance deep ultraviolet all solid state laser sources (DUV-DPL), such as higher power, narrower linewidth.




The "Deep Ultraviolet Laser and Artificial Crystal Hub Technology" project is the first in the world to achieve high power, narrow line width 177.3nm deep ultraviolet laser output, to solve the large size KBBF family deep ultraviolet crystal growth, high quality KBBF-PCT device development, high efficiency deep ultraviolet The key points of frequency doubling technology, narrow linewidth deep ultraviolet laser generation technology, KBBF crystal thickness exceeded 4mm, and the first high power (146.5 mW), narrow line width (0.88 pm) 177.3 nm deep ultraviolet laser output was obtained. This topic has perfected and consolidated the deep ultraviolet independent intellectual property system owned by China, and filled the gap of direct multiplier to produce high power, narrow linewidth deep ultraviolet laser, and expanded the application of deep ultraviolet laser for practical and precise application.




The "Ultraviolet Laser Industrial Hub Technology and Application" group solved the difficult problems of centimeter-scale BBSAG crystal growth, nonlinear crystal ultra-smooth surface processing, and industrial-grade application of all-solid-state lasers, and broke through the high beam quality UV frequency conversion. The nonlinear optical crystal has many life-time technologies such as anti-damage and beam pointing non-disruptiveness. It has developed 10-30W all-solid-state UV lasers with different power levels and new BBSAG quadruple-frequency devices. The product performance has reached the level of similar foreign products. Formed a set of all-solid-state UV laser core technology with independent intellectual property rights, and realized the trial of UV laser on micro-machining equipment.

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